MEMS angular rate sensors

Bosch is famous for their mechanical gyroscope sensors in automotive applications, used e.g. in ESP systems.

For the area of Consumer Electronics, angular rate sensors suite well to improve applications like

  • Navigation
  • Image stabilization
  • Gaming

The sensing element is built using micromachining technology. An angular rate in the chip plane is capacitively detected by applying the principle of a mechanical gyro. To get the measuring effect the sensing mass is forced to an in-plane rotational oscillation. Due to the symmetry of the sensing element and only one centralized suspension in the pivot point, the sensor has a low sensitivity to translational accelerations.