MEMS acceleration sensors for various applications

The triaxial acceleration sensor family is specifically designed for low-power applications to enhance functionality in mobile phones and consumer electronic devices.

The triaxial accelerometers are available in small and thin QFN or LGA packages. The interrupt feature of the sensors offers an additional special advantage for mobile applications such as a battery saving mode or free-fall detection.

The sensing principle of all listed sensors is capacitive detection.

Features:

  • surface micromachined sensor element and ASIC in standard QFN or LGA packages for consumer
  • acceleration measurement ranges from ±1g to ±16g
  • all sensors are 3-axis acceleration sensors - ultra-low power
  • full self test capability of sensor and ASIC
  • temperature range -40..+ 85°C (or higher)
  • small number of external components necessary

Bosch produces acceleration sensors since 1990. Applications within the automotive area are airbag restraint systems, the electronic stability program (ESP), ABS (anti-lock braking system) and tilt measurement for alarm systems, hill-hold control and active suspension systems.

The first systems incorporated piezoelectric ceramics or Hall devices as sensing elements. Volume production of a new generation started in 1997 as a low-cost solution with increased functionality and reliability. Since then, more than 150 Million micromechanical accelerometers have been produced. These sensing elements are manufactured using surface micromachining technology developed by Bosch. The process features a thick polysilicon layer to realize movable structures. Proof mass and electrodes are covered with bulk micro-machined caps on wafer level. Sensors and specifically designed ASICs are assembled in standard SMD packages.

 
Documentation 
QFN / LGA package 
Measurements 
Flyer
Datasheet
 
 
 
3 mm x 3 mm x 0.9 mm 
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Datasheet
 
 
 
4 mm x 4mm x 0.9 mm 
Analog triaxial acceleration sensors of Bosch Sensortec provide three parallel analog output signals in a +- 4g acceleration range. In addition to the parallel x, y, and z output signals there is the option to multiplex any axis to a single supplementary output pin in a freely customized manner.

BMA140 and BMA145 are similar in function, differ only in package size.

 
Documentation 
QFN / LGA package  
Measurements  
Flyer
 
 
 
3 mm x 3 mm x 0.9mm 
Flyer
 
 
 
3 mm x 3 mm x 0.9 mm  
Flyer
BMA150 datasheet
 
 
 
3 mm x 3 mm x 0.9 mm 
Flyer
 
 
 
3 mm x 3 mm x 0.9mm 
Flyer
 
 
 
2 mm x 2 mm x 0.98 mm  
The digital acceleration sensors of Bosch Sensortec mark a new generation of digital acceleration sensors.
Function and performance of the sensor can be tailored to customer specific applications by means of parameter and control settings.

The new sensor BMA220 has a footprint of only 2 mm x 2 mm and a height of 0.98 mm and uses a very low current consumption.

Due to their versatility a grand concurrency of application is made possible, combined with an advanced system power management for mobile devices.